A novel neural network model of capacitive MEMS accelerometers

Citation

Bahadorimehr, Alireza and Hamidon, Mohd Nizar and Hezarjaribi, Yadollah (2008) A novel neural network model of capacitive MEMS accelerometers. In: 2008 IEEE International Conference on Semiconductor Electronics (ICSE 2008), 25-27 Nov. 2008, Johor Bahru, Malaysia. (pp. 174-178).

Abstract

This paper presents a nonlinear model for a capacitive Micro-electromechanical accelerometer (MEMA). System parameters of the accelerometer are developed using the effect of cubic term of the folded-flexure spring. To solving this equation we use FEA method. The neural network (NN) uses Levenberg-Marquardt (LM) method for training the system to have more accurate response. The designed NN can identify and predict the displacement of movable mass of accelerometer. The simulation results are very promising.

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Additional Metadata

Item Type:	Conference or Workshop Item (Paper)
Divisions:	Faculty of Engineering
DOI Number:	https://doi.org/10.1109/SMELEC.2008.4770302
Publisher:	IEEE
Keywords:	Neural network; Nonlinear model; Capacitive MEMA
Depositing User:	Nabilah Mustapa
Date Deposited:	04 Jul 2019 03:47
Last Modified:	09 Jul 2020 06:36
Altmetrics:	http://www.altmetric.com/details.php?domain=psasir.upm.edu.my&doi=10.1109/SMELEC.2008.4770302
URI:	http://psasir.upm.edu.my/id/eprint/69365
Statistic Details:	View Download Statistic

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