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Particle reduction at metal deposition process in wafer fabrication.


Citation

Abdul Aziz, Faieza and Ahmad, Izham Hazizi and Zulkifli, Norzima and Mohd. Yusuff, Rosnah (2012) Particle reduction at metal deposition process in wafer fabrication. In: Manufacturing System. InTech, Rijeka, Croatia, pp. 1-26. ISBN 9789535105305

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Additional Metadata

Item Type: Book Section
Divisions: Faculty of Engineering
DOI Number: https://doi.org/10.5772/38239
Publisher: InTech
Keywords: Wafer; Particle; Metal deposition; Metallization; Manufacturing.
Depositing User: Suzila Mohamad Kasim
Date Deposited: 11 Mar 2014 09:02
Last Modified: 11 Mar 2014 09:02
URI: http://psasir.upm.edu.my/id/eprint/26269
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