Citation
Abdul Aziz, Faieza and Ahmad, Izham Hazizi and Zulkifli, Norzima and Mohd. Yusuff, Rosnah
(2012)
Particle reduction at metal deposition process in wafer fabrication.
In:
Manufacturing System.
InTech, Rijeka, Croatia, pp. 1-26.
ISBN 9789535105305
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Additional Metadata
| Item Type: | Book Section |
|---|---|
| Divisions: | Faculty of Engineering |
| DOI Number: | https://doi.org/10.5772/38239 |
| Publisher: | InTech |
| Keywords: | Wafer; Particle; Metal deposition; Metallization; Manufacturing. |
| Depositing User: | Suzila Mohamad Kasim |
| Date Deposited: | 11 Mar 2014 01:02 |
| Last Modified: | 11 Mar 2014 01:02 |
| URI: | http://psasir.upm.edu.my/id/eprint/26269 |
| Statistic Details: | View Download Statistic |
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