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Particle reduction at metal deposition process in wafer fabrication.

Abdul Aziz, Faieza and Ahmad, Izham Hazizi and Zulkifli, Norzima and Mohd. Yusuff, Rosnah (2012) Particle reduction at metal deposition process in wafer fabrication. In: Manufacturing System. InTech, Rijeka, Croatia, pp. 1-26. ISBN 9789535105305.

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Item Type:Book Section
Keyword:Wafer; Particle; Metal deposition; Metallization; Manufacturing.
Faculty or Institute:Faculty of Engineering
Publisher:InTech
DOI Number:10.5772/38239
ID Code:26269
Deposited By: Suzila Mohamad Kasim
Deposited On:11 Mar 2014 09:02
Last Modified:11 Mar 2014 09:02

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