Effect of the sensing layer resistivity on sensitivity in DSAWR sensors

Citation

Saglam, Hilal Kubra and Hamidon, Mohd Nizar and Coban, Omer and Ertugrul, Mehmet (2019) Effect of the sensing layer resistivity on sensitivity in DSAWR sensors. In: 2019 IEEE Regional Symposium on Micro and Nanoelectronics (RSM), 21-23 Aug. 2019, Putrajaya, Malaysia. (pp. 24-26).

Abstract

SAW sensors have become important for gas detection applications in recent years. One of the parameters affecting the sensitivity of SAW sensors is the resistivity of the sensing layer. In this study, it is tried to determine the sensitivities of the sensors for different resistance values for the designed DSAWR. In accordance with this purpose, instead of using actual sensing layers whose resistance can be changed by parameters such as temperature etc., 8 different fixed resistors in the range of 3 to 4M ohms were used to fully demonstrate the effect of the resistance. It has been found that the DSAWR has better sensitivity for active layer resistances between kΩ to a few hundred kΩ.

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Additional Metadata

Item Type:	Conference or Workshop Item (Paper)
Divisions:	Institute of Advanced Technology
DOI Number:	https://doi.org/10.1109/RSM46715.2019.8943550
Publisher:	IEEE
Keywords:	SAW resonator; Gas sensor; SAW sensor; DSAWR
Depositing User:	Nabilah Mustapa
Date Deposited:	03 Jun 2020 06:33
Last Modified:	03 Jun 2020 06:33
Altmetrics:	http://www.altmetric.com/details.php?domain=psasir.upm.edu.my&doi=10.1109/RSM46715.2019.8943550
URI:	http://psasir.upm.edu.my/id/eprint/78110
Statistic Details:	View Download Statistic

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