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Development of nanocrystalline laser ablated thick film array gas sensor


Abadi, Mohammad Hadi Nezhad Shahrokh and Hamidon, Mohd Nizar and Shaari, Abdul Halim and Abdullah, Norhafizah and Wagiran, Rahman and Misron, Norhisam (2010) Development of nanocrystalline laser ablated thick film array gas sensor. In: 2010 IEEE International Conference on Semiconductor Electronics (ICSE 2010), 28-30 June 2010, Melaka, Malaysia. (pp. 88-91).


A multi-layer thick film array sensor for gas sensing application including heater element, insulator layer, and interdigitated electrodes was designed and fabricated on alumina substrate. Tin dioxide and platinum nanopowder were used in the pellet form as the active and catalyst layers, respectively. Pulse laser ablation deposition (PLAD) technique was used to deposit the sensitive layer onto the electrode part of each sensor. Microstructural and morphological properties of the sensor surface were determined. Sensors were exposed to wood smoke and their sensitivity were measured and compared with the results of the sensors without catalyst layer.

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Additional Metadata

Item Type: Conference or Workshop Item (Paper)
Divisions: Faculty of Engineering
Faculty of Science
DOI Number: https://doi.org/10.1109/SMELEC.2010.5549421
Publisher: IEEE
Keywords: Array gas sensor; SnO2; Thick film; Laser ablation
Depositing User: Nabilah Mustapa
Date Deposited: 09 May 2019 01:44
Last Modified: 09 May 2019 01:44
Altmetrics: http://www.altmetric.com/details.php?domain=psasir.upm.edu.my&doi=10.1109/SMELEC.2010.5549421
URI: http://psasir.upm.edu.my/id/eprint/68162
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