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Sensitivity of piezoresistive pressure sensor with inner diaphragm


Chua, Kean Hong and Ismail, Noor Faezah and Md Yunus, Nurul Amziah and Ahmad, Desa (2017) Sensitivity of piezoresistive pressure sensor with inner diaphragm. In: 2017 IEEE Asia Pacific Conference on Postgraduate Research in Microelectronics and Electronics (PrimeAsia), 31 Oct.-2 Nov. 2017, Kuala Lumpur, Malaysia. (pp. 129-132).


This paper emphasizes the optimization of piezoresistive pressure sensor. The proposed design is to implement inner diaphragm to increase the sensitivity of the sensor. Comparison between the original design and proposed design is made. The adjustment and performance of the proposed design are also discussed.

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Additional Metadata

Item Type: Conference or Workshop Item (Paper)
Divisions: Faculty of Engineering
DOI Number: https://doi.org/10.1109/PRIMEASIA.2017.8280381
Publisher: IEEE
Keywords: Component; Piezoresistive; Pressure sensor; Sensitivity; COMSOL
Depositing User: Nabilah Mustapa
Date Deposited: 06 Mar 2018 08:27
Last Modified: 06 Mar 2018 08:27
Altmetrics: http://www.altmetric.com/details.php?domain=psasir.upm.edu.my&doi=10.1109/PRIMEASIA.2017.8280381
URI: http://psasir.upm.edu.my/id/eprint/59471
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