Micromachined W-band integrated rectangular waveguide filter utilising SU-8

Citation

Ismail, Alyani and Razalli, Mohammad Shahrazel and Mahdi, Mohd Adzir and Wan Darman, Wan Nurul Izza and Raja Abdullah, Raja Syamsul Azmir and Mohd Isa, Maryam (2007) Micromachined W-band integrated rectangular waveguide filter utilising SU-8. In: Asia-Pacific Microwave Conference (APMC 2007), 11-14 Dec. 2007, Bangkok, Thailand. .

Abstract

This paper is a study on the design of microwave waveguide filter suitable for micromachining process. Novel structure and processes are introduced which allow accurate fabrication of low loss waveguide filter. This new technique applies micro-fabrication processes to improve fabrication accuracy. A W-band micromachined rectangular waveguide filter utilizing SU-8 micromachining with CPW input and output ports has been designed. Simulated frequency responses exhibit insertion loss of 1.18 dB across 1 GHz bandwidth for W-band frequency range centered at 93 GHz with return loss better than -20 dB.

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Additional Metadata

Item Type:	Conference or Workshop Item (Paper)
Divisions:	Faculty of Engineering
DOI Number:	https://doi.org/10.1109/APMC.2007.4554831
Publisher:	IEEE
Keywords:	Coplanar input and output port; Micromachined; Millimetre-wave filter; Rectangular cavity
Depositing User:	Nabilah Mustapa
Date Deposited:	14 Jul 2016 04:40
Last Modified:	14 Jul 2016 04:40
Altmetrics:	http://www.altmetric.com/details.php?domain=psasir.upm.edu.my&doi=10.1109/APMC.2007.4554831
URI:	http://psasir.upm.edu.my/id/eprint/47684
Statistic Details:	View Download Statistic

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