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Valuation on MEMS pressure sensors and device applications


Md Yunus, Nurul Amziah and Abdul Halin, Izhal and Sulaiman, Nasri and Ismail, Noor Faezah and Ong, Kai Sheng (2015) Valuation on MEMS pressure sensors and device applications. International Journal of Electrical, Computer, Energetic, Electronic and Communication Engineering, 9 (8). pp. 768-776. ISSN 0950-4125


The MEMS pressure sensor has been introduced and presented in this paper. The types of pressure sensor and its theory of operation are also included. The latest MEMS technology, the fabrication processes of pressure sensor are explored and discussed. Besides, various device applications of pressure sensor such as tire pressure-monitoring system, diesel particulate filter and others are explained. Due to further miniaturization of the device nowadays, the pressure sensor with nanotechnology (NEMS) is also reviewed. The NEMS pressure sensor is expected to have better performance as well as lower in its cost. It has gained an excellent popularity in many applications.

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Additional Metadata

Item Type: Article
Divisions: Faculty of Engineering
DOI Number: https://doi.org/10.1108/09504121011045809
Publisher: World Academy of Science, Engineering and Technology
Keywords: Pressure sensor; Diaphragm; MEMS; Automotive application; Biomedical application; NEMS
Depositing User: Ms. Nida Hidayati Ghazali
Date Deposited: 30 Jan 2018 10:44
Last Modified: 30 Jan 2018 10:44
Altmetrics: http://www.altmetric.com/details.php?domain=psasir.upm.edu.my&doi=10.1108/09504121011045809
URI: http://psasir.upm.edu.my/id/eprint/46851
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