Effect of Co catalyst on PECVD growth of carbon nanotubes for NEMS applications

Citation

Lee, Mai Woon and Md Razib, Nadia and Teh, Aun Shih and Bien, Daniel Chia Sheng and Chen, Soo Kien and Abdullah @ Ab. Aziz, Shahrul Azam (2012) Effect of Co catalyst on PECVD growth of carbon nanotubes for NEMS applications. In: 10th IEEE International Conference on Semiconductor Electronics (ICSE 2012), 19-21 Sept. 2012, Grand Millenium Hotel, Kuala Lumpur. (pp. 14-17).

Abstract

In this paper the effect of cobalt (Co) catalyst on the growth of carbon nanotubes (CNTs) was studied. CNTs were vertically grown by plasma enhanced chemical vapor deposition method (PECVD) at 700°C with various sputtered Co catalyst thicknesses. Experimental results shows that for carbon nanotube growth duration of 20 minutes, growth was only achieved with thinner catalyst layers but when the growth duration was doubled, high density of CNTS were also observed with thicker catalyst layers with taller nanotubes formed. The nucleation of the catalyst with various thicknesses was also studied as the absorption of the carbon feedstock is dependent on the initial size of the catalyst island.

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Additional Metadata

Item Type:	Conference or Workshop Item (Paper)
Divisions:	Faculty of Science
DOI Number:	https://doi.org/10.1109/SMElec.2012.6417080
Publisher:	IEEE
Keywords:	Carbon nanotubes; Nanomaterials; Chemical vapor deposition; PECVD; Cobalt; Nucleation
Depositing User:	Nabilah Mustapa
Date Deposited:	04 Aug 2020 02:42
Last Modified:	04 Aug 2020 02:42
Altmetrics:	http://www.altmetric.com/details.php?domain=psasir.upm.edu.my&doi=10.1109/SMElec.2012.6417080
URI:	http://psasir.upm.edu.my/id/eprint/45174
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