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A comprehensive study on RF MEMS switch


Jaafar, Haslina and Beh, Kean Sheng and Md Yunus, Nurul Amziah and Wan Hasan, Wan Zuha and Shafie, Suhaidi and Sidek, Othman (2014) A comprehensive study on RF MEMS switch. Microsystem Technologies, 20 (12). pp. 2109-2121. ISSN 0946-7076; ESSN: 1432-1858


This paper emphasis on state-of-the-art of the earlier until the current trend and demand, principles, design considerations, key performance and fabrication technology of RF MEMS switch devices developed over the past few years. RF MEMS switch performance and features such as actuation voltage, insertion loss, isolation and ease with cost of fabrication and applications are compared and discussed.

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Additional Metadata

Item Type: Article
Divisions: Faculty of Engineering
DOI Number: https://doi.org/10.1007/s00542-014-2276-7
Publisher: Springer
Keywords: RF MEMS switch; RF communication systems; MEMS technology
Depositing User: Nabilah Mustapa
Date Deposited: 18 Dec 2015 05:30
Last Modified: 18 Dec 2015 05:30
Altmetrics: http://www.altmetric.com/details.php?domain=psasir.upm.edu.my&doi=10.1007/s00542-014-2276-7
URI: http://psasir.upm.edu.my/id/eprint/36147
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