Design Capacitive Pressure Sensor (MEMS) with High Sensitivity and Linearity for Biomedical Application

The advancement of pressure sensors customized for purposes marks notable progress, in healthcare diagnostics and patient supervision. This article delves into creating and assessing of a capacitive pressure sensor designed to measure physiological pressures with utmost accuracy and sensitivity. The sensor’s structure integrates materials compatible with the body to ensure safety and dependability when interacting with bodily tissues. Thorough simulations and validations showcase the sensors performance emphasizing its responsiveness across various pressures in medical settings. The assessment encompasses an analysis of the sensor’s sensitivity at (12.4 fF/mmHg) exceptional linearity within a nonlinearity range of ±0.015% with a small diaphragm diameter (0.5 mm) and long-term reliability. The results indicate that the suggested capacitive pressure sensor exhibits promising possibilities for use in fields like blood pressure monitoring, intracranial pressure measurement and other crucial areas of biomedicine, providing a nonintrusive and cost-efficient method, for real-time health monitoring and diagnostic purposes.

Text 126484.pdf - Published Version Available under License Creative Commons Attribution Non-commercial. Download (1MB) Official URL or Download Paper: https://ijeee.edu.iq/ijeee/article/view/660

Actions (login required)

View Item