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Top-down fabrication of silicon nanowire sensor using electron beam and optical mixed lithography

Abd Rahman, Siti Fatimah and Yusof, Nor Azah and Hamidon, Mohd Nizar and Mohd Zawawi, Ruzniza and Hashim, Uda (2014) Top-down fabrication of silicon nanowire sensor using electron beam and optical mixed lithography. In: 2014 IEEE International Conference on Semiconductor Electronics (ICSE 2014), 27-29 Aug. 2014, Berjaya Times Square Hotel, Kuala Lumpur, Malaysia. pp. 64-67.

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Abstract

The realization of reliable nanobiosensor devices requires the improvement of fabrication techniques to form the nanometer-sized structures and patterns, which were used to attach nano materials such as DNA for the device elements. This study demonstrates the sensitivity of silicon nanowires (SiNWs) as a sensing element in sensor application. Starting with silicon on insulator (SOI) material, the SiNWs with <100nm in width were fabricated using electron beam lithography combined with conventional CMOS process. Different numbers of SiNWs which are single, 10 arrays of nanowires and 20 arrays of nanowires were developed. Subsequently, the two metal electrodes which are designated as source (S) and drain (D) were fabricated on top of individual SiNWs using optical lithography process. Optical and electrical characteristic have been proposed to verify the outcome of the fabricated structures. One major part is to observe the SiNWs optically in order to meet the nano-scale variation by using High Power Microscope (HPM) inspection and Field Emission Scanning Electron Microscope (FESEM) imaging. Finally, the samples will be tested electrically using I-V measurement system. The results show that device with single SiNW with 60nm in width give the highest resistivity value due to surface to volume ratio.

Item Type:Conference or Workshop Item (Paper)
Keyword:Electrical characterization; Electron beam lithography; Silicon nanowires
Faculty or Institute:Faculty of Engineering
Faculty of Science
Publisher:IEEE
DOI Number:10.1109/SMELEC.2014.6920796
Altmetrics:http://www.altmetric.com/details.php?domain=psasir.upm.edu.my&doi=10.1109/SMELEC.2014.6920796
ID Code:55666
Deposited By: Nabilah Mustapa
Deposited On:07 Jun 2017 12:52
Last Modified:07 Jun 2017 12:52

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