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3D CFD simulations: effect of operation parameters on the deposition of photocatalytic TiO2 nanoparticles by MOCVD


Citation

Othman, Siti Hajar and Abdul Rashid, Suraya and Mohd Ghazi, Tinia Idaty and Abdullah, Norhafizah (2015) 3D CFD simulations: effect of operation parameters on the deposition of photocatalytic TiO2 nanoparticles by MOCVD. Chemical Vapor Deposition, 21 (4-5-6). pp. 99-110. ISSN 0948-1907; ESSN: 1521-3862

Abstract

A 3-dimensional (3D) computational fluid dynamics (CFD) simulation study on the effect of temperature and carrier-gas flow rate on the deposition of photocatalytic titanium dioxide (TiO2) nanoparticles by metal-organic (MO)CVD is presented. The model predicts the temperature, velocity, mass fraction of reactants and products, kinetic rate of reaction, and surface deposition rate profiles. Increasing temperature and reducing carrier gas flow rate increases the deposition rate and hence the amount of nanoparticles produced. Unlike carrier-gas flow rate, temperature is significant in determining the rate of surface deposition. Simulation results are validated by experiments whenever possible due to limited data. Decent agreement between experiment and simulation supports the reliability of the simulation.


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Additional Metadata

Item Type: Article
Divisions: Faculty of Engineering
Institute of Advanced Technology
DOI Number: https://doi.org/10.1002/cvde.201407127
Publisher: Wiley-VCH Verlag GmbH & Co. KGaA
Keywords: CFD; MOCVD; Nanoparticles; Simulation; Titanium dioxide
Depositing User: Nabilah Mustapa
Date Deposited: 01 Sep 2015 00:08
Last Modified: 12 May 2016 03:43
Altmetrics: http://www.altmetric.com/details.php?domain=psasir.upm.edu.my&doi=10.1002/cvde.201407127
URI: http://psasir.upm.edu.my/id/eprint/36118
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