Plasma polymerization. IV. A systematic investigation of the inductively coupled RF plasma polymerization of pentafluorobenzene

Citation

Clark, D. T. and Abrahman, M. Z. (1981) Plasma polymerization. IV. A systematic investigation of the inductively coupled RF plasma polymerization of pentafluorobenzene. Journal of Polymer Science: Polymer Chemistry Edition, 19 (9). pp. 2129-2149. ISSN 0360-6376

Abstract

The composition and gross structural features of plasma polymer films prepared by inductively coupled RF plasmas excited in pentafluorobenzene were investigated by ESCA as a function of the operating parameters. The rate of film deposition is dependent on the W/FM parameter and on site of deposition. The polymer formed in the glow region shows only small variations in structure as a function of power and pressure. Polymer films deposited in the regions away from the site of primary excitation typically have a higher fluorine content than those formed in the coil region; the stoichiometry for the latter is comparable to that of the starting material.

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Additional Metadata

Item Type:	Article
Divisions:	Universiti Pertanian Malaysia
DOI Number:	https://doi.org/10.1002/pol.1981.170190901
Publisher:	John Wiley & Sons, Inc.
Keywords:	Polymer films; Plasma polymerization
Depositing User:	Mohd Hafiz Che Mahasan
Date Deposited:	15 Apr 2015 00:50
Last Modified:	15 Apr 2015 00:50
Altmetrics:	http://www.altmetric.com/details.php?domain=psasir.upm.edu.my&doi=10.1002/pol.1981.170190901
URI:	http://psasir.upm.edu.my/id/eprint/33912
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